Specifications

• WXS-800 Wafer Inspection Microscope with reflected light illumination delivers high efficiency, reliability and easy operation for semiconductor defect inspection
• Brightfield, Darkfield, Simple Polarization and Differential Interference Contrast ("DIC", optional) observation methods
• Ergonomic, tilting (0°-30°) trinocular viewing head for comfort during observation
• The WXS-800 produces an erect image, meaning the orientation seen in the microscope is the same orientation as the physical specimen (i.e., left is left, top is top, etc.).  This provides:
• Accurate interpretation
• Ease of navigation
• Reduces errors
• Simplifies training and communication
• Consistency with imaging and documentation
• Extended wide FOV eyepieces EW10X/25mm
• Infinity Plan semi-Apochromatic 5x (NA 0.15), 10x (NA 0.3), 20x (NA 0.4), 50x (NA 0.8), and 100x (NA 0.9) Brightfield/Darkfield objectives
• Encoded sextuple nosepiece with DIC slot
• Illumination includes Reflected Light Illuminator, condenser (NA 0.65) with aperture diaphragm; 3-position turret (Brightfield, Brightfield+ND6, Darkfield positions); 5W LED with Köhler alignment and variable intensity adjustment; Light Intensity Memory (LIM) function; 2 filter slots
• Double Layer Mechanical Stage; 14” x 12” platform; 210mm x 210mm movement range; sample holder for 8” wafers; XY stage stalk; mechanical clutch for course stage positioning
• Low position coaxial coarse/fine focus; focus travel limit; 33mm focusing range; 1μm fine focus indication
• Included filter sliders: blue, green, yellow, frosted
• Optional Accessories: Digital cameras and camera adapter; DIC slider and prisms; Reticles; Stage micrometers
• Universal power supply (90v-240v)
• Product weight 60lbs.